2013 Symposia on VLSI Technology and Circuits
TOKYO - Tuesday, June 11th 2013 [ME NewsWire]
(BUSINESS
WIRE/ME NewsWire)-- Toshiba Corporation (TOKYO:6502) today announced
the development of a high power gain transistor using a CMOS compatible
process. The transistor efficiently reduces power consumption in high
frequency RF/analog front-end application. Details will be presented on
June 12 at the 2013 Symposia on VLSI Technology and Circuits, held in
Kyoto, Japan, June 11-14, 2013.
Rapid growth in wireless and
mobile devices, including smart phones and tablets, is driving demand
for RF/Analog circuits offering low-power consumption and
high-performance. However, it is difficult to apply the advanced device
and process technologies widely used in digital circuitry to RF/Analog
circuits, as transistor scaling results in noise and deterioration in
energy gain efficiency.
Toshiba has addressed this problem with a
novel device structure using two different materials as the gate
electrode of a single MOSFET and a process integration scheme that
employs a widely used common semiconductor manufacturing method. This
approach has achieved nanometer level gate length control.
Experimental
results with the transistor have secured significantly lower power
consumption without any slow down in operation speed.
The
distinctive characteristic of the device structure is a thin oxide
barrier film between the two materials, the n-type Si and p-type Si in
the gate electrode, which suppresses impurity inter-diffusion. A high
electric field under the gate electrode region can be achieved,
enhancing amplifier efficiency. A different gate oxide film thickness is
implemented with different gate electrode materials. This structure
achieves a well-controlled device property in saturation mode even in
low operation voltage.
The new device fabrication process is also
applicable to the high-permittivity (high-k) gate insulator used in
advanced digital LSI manufacturing.
About Toshiba
Toshiba
is a world-leading diversified manufacturer, solutions provider and
marketer of advanced electronic and electrical products and systems.
Toshiba Group brings innovation and imagination to a wide range of
businesses: digital products, including LCD TVs, notebook PCs, retail
solutions and MFPs; electronic devices, including semiconductors,
storage products and materials; industrial and social infrastructure
systems, including power generation systems, smart community solutions,
medical systems and escalators & elevators; and home appliances.
Toshiba
was founded in 1875, and today operates a global network of more than
550 consolidated companies, with 202,000 employees worldwide and annual
sales surpassing 6.1 trillion yen (US$74 billion). Visit Toshiba's web
site at www.toshiba.co.jp/index.htm
Contacts
Toshiba Corporation
Semiconductor & Storage Products Company
Megumi Genchi / Kunio Noguchi, +81-3-3457-3367
semicon-NR-mailbox@ml.toshiba.co.jp
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